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Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 2,   Pages 158-180 doi: 10.1007/s11465-017-0455-9

Abstract:

Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracyThe conception, applications and history of ultra-precision machining are introduced in this article,and the developments of ultra-precision machining technologies, especially ultra-precision grinding,ultra-precision cutting and polishing are also reviewed.

Keywords： ultra-precision grinding     ultra-precision cutting     ultra-precision polishing     research status in China     development    

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Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 77-88 doi: 10.1007/s11465-017-0411-8

Abstract:

Soft-brittle crystal materials are widely used in many fields, especially optics and microelectronics. However, these materials are difficult to machine through traditional machining methods because of their brittle, soft, and anisotropic nature. In this article, the characteristics and machining difficulties of soft-brittle and crystals are presented. Moreover, the latest research progress of novel machining technologies and their applications for soft-brittle crystals are introduced by using some representative materials (e.g., potassium dihydrogen phosphate (KDP), cadmium zinc telluride (CZT)) as examples. This article reviews the research progress of soft-brittle crystals processing.

Keywords： brittle     soft     functional crystal     ultra-precision machining    

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Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 1-2 doi: 10.1007/s11465-017-0445-y

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Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

Frontiers of Mechanical Engineering 2009, Volume 4, Issue 1,   Pages 64-70 doi: 10.1007/s11465-009-0009-x

Abstract: elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision

Keywords： dynamics analysis     air-bearing     linear stage     reduction    

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Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 89-98 doi: 10.1007/s11465-017-0412-7

Abstract: Ultra-precision machining is widely used in processing hard and brittle materials to obtain nanoscaleThis paper provides a review of present research on the molecular dynamics simulation of ultra-precision

Keywords： MD simulation     ultra-precision machining     hard and brittle materials     machining mechanism     review    

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Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 4,   Pages 400-407 doi: 10.1007/s11465-008-0060-z

Abstract: Air-bearings are installed between the stator and the mover of ultra-precision linear stages to suppress

Keywords： manufacture     different     interaction     air-bearings     response amplitude    

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Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 2,   Pages 158-163 doi: 10.1007/s11465-008-0031-4

Abstract: This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precisionMeanwhile, the ultra-precision air bearing stage driven by the linear-motor is characterized by zeroThe results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision

Keywords： post-yield     linear-motor     advanced sliding     pre-yield     position    

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Ultra-Precision Machining Technology and Equipment for High-End Optical Elements

Jiang Zhuangde, Li Changsheng , Sun Lin, Duan Duanzhi, Kang Chengwei ,Chen Shanshan, Lin Qijing, Yang Shuming

Strategic Study of CAE 2023, Volume 25, Issue 1,   Pages 131-141 doi: 10.15302/J-SSCAE-2023.07.003

Abstract: Researching the ultra-precision machining technology and equipment for high-end optical elementsIn this study, the ultra-precision machining methods and equipment for optical elements, high-performancebasic components, and measurement methods and equipment used in ultra-precision optical machining Five development trends are summarized including extremalization of precision and size, integration ofThrough extensive survey and discussions, a technology roadmap for ultra-precision manufacturing of high-end

Keywords： optical element     precision manufacturing     ultra-precision machine tool     ultra-precision machining     optical    

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Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 2,   Pages 119-132 doi: 10.1007/s11465-008-0034-1

Abstract: of science and technology, microelectronics manufacturing, photonics technology, space technology, ultra-precisionmachining, micro-robotics, biomedical engineering and other fields urgently need the support of modern precisionModern precision driving technology can be generally divided into two parts: electromagnetic and non-electromagneticThis paper presents the development of piezoelectric precision driving technology at home and abroadparts manipulation and assembly technology; 4) biomedical engineering; 5) aerospace technology; and 6) ultra-precision

Keywords： Electromagnetic     ultra-precision processing     technology     piezoelectric     cumbrous    

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Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 2,   Pages 193-202 doi: 10.1007/s11465-017-0448-8

Abstract: The most common method of manufacturing half-meter KDP crystals is ultra-precision fly cutting.When processing KDP crystals by ultra-precision fly cutting, the dynamic characteristics of the fly cuttingthis study, the anisotropic machinability of KDP crystals and the causes of typical surface errors in ultra-precision

Keywords： ultra-precision fly cutting     large-aperture KDP crystals     spatial frequency     processing error    

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Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 3,   Pages 350-355 doi: 10.1007/s11465-007-0061-3

Abstract: In this paper, a novel conditioning technique using copper bonded diamond grinding wheels of 91 yD grain size and electrolytic in-process dressing (ELID) is first developed to precisely and effectively condition a nickel-electroplated monolayer coarse-grained diamond grinding wheel of 151 μm grain size. Under optimised conditioning parameters, the super abrasive diamond wheel was well conditioned in terms of a minimized run-out error and flattened diamond grain surfaces of constant peripheral envelope. The conditioning force was monitored by a force transducer, while the modified wheel surface status was in-situ monitored by a coaxial optical distance measurement system. Finally, the grinding experiment on BK7 was conducted using the well-conditioned wheel with the corresponding surface morphology and subsurface damage measured by atomic force microscope (AFM) and scanning electric microscope (SEM), respectively. The experimental result shows that the newly developed conditioning technique is applicable and feasible to ductile grinding optical glass featuring nano scale surface roughness, indicating the potential of super abrasive diamond wheels in ductile machining brittle materials.

Keywords： ELID     peripheral     electrolytic in-process     nickel-electroplated monolayer     measurement    

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A Laser Scanner–Stage Synchronized System Supporting the Large-Area Precision Polishing of Additive-Manufactured Article

Mengjia Cui, Libin Lu, Zhen Zhang, Yingchun Guan

Engineering 2021, Volume 7, Issue 12,   Pages 1732-1740 doi: 10.1016/j.eng.2020.06.028

Abstract: proposes a scanner–stage synchronized approach emphasizing a novel control structure for the laser polishingThe proposed synchronized system paves the way for high-speed, high-precision, and large-area laser material

Keywords： Laser polishing     Stitching errors     Synchronized control system     Additive manufacturing    

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Preparation of composite abrasives by electrostatic self assembly methodand its polishing propertiesin Cu chemical mechanical polishing

Huang Yishen,Xu Xuefeng,Yao Chunyan,Hu Jiande and Peng Wei

Strategic Study of CAE 2012, Volume 14, Issue 10,   Pages 82-89

Abstract: The composite abrasives slurries are prepared for copper polishing.The polishing results indicate that it is SiO2 abrasives, not only coated SiO2 abrasive on polymer particlesbut also free SiO2 abrasive in slurry, that offer the polishing action.The material removal rates of copper polishing are 264 nm/min, 348 nm/min and 476 nm/min using single

Keywords： chemical mechanical polishing     polishing slurry     composite abrasives     polyelectrolyte     copper    

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Review on mechanism and process of surface polishing using lasers

Arun KRISHNAN, Fengzhou FANG

Frontiers of Mechanical Engineering 2019, Volume 14, Issue 3,   Pages 299-319 doi: 10.1007/s11465-019-0535-0

Abstract: Laser polishing is a technology of smoothening the surface of various materials with highly intense laserHigh precision polishing of surfaces can be done using laser process.Currently, laser polishing has extended its applications from photonics to molds as well as bio-medicalConventional polishing techniques have many drawbacks such as less capability of polishing freeform surfacesparameters briefly to get a better understanding about the entire polishing process.

Keywords： laser polishing     surface roughness     process parameters     mechanism    

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Title Author Date Type Operation

Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

Journal Article

Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

Journal Article

Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

Journal Article

Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

Journal Article

Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

Journal Article

Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

Journal Article

Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

Journal Article

Ultra-Precision Machining Technology and Equipment for High-End Optical Elements

Jiang Zhuangde, Li Changsheng , Sun Lin, Duan Duanzhi, Kang Chengwei ,Chen Shanshan, Lin Qijing, Yang Shuming

Journal Article

Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

Journal Article

Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

Journal Article

Jianguo He: Ultra-precision Cutting Technology and Equipment toward Extreme Manufacturing（2019.10.10）

23 Apr 2021

Conference Videos

Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

Journal Article

A Laser Scanner–Stage Synchronized System Supporting the Large-Area Precision Polishing of Additive-Manufactured

Mengjia Cui, Libin Lu, Zhen Zhang, Yingchun Guan

Journal Article

Preparation of composite abrasives by electrostatic self assembly methodand its polishing propertiesin Cu chemical mechanical polishing

Huang Yishen,Xu Xuefeng,Yao Chunyan,Hu Jiande and Peng Wei

Journal Article

Review on mechanism and process of surface polishing using lasers

Arun KRISHNAN, Fengzhou FANG

Journal Article